Mahatma Gandhi University EE 010 606 L02 VLSI Systems Teaching scheme 2 hours lecture and 2 hours tutorial per week zeroes Credits:4 Objective: • To cater the needs of students who want a comprehensive study of the principle and techniques of modern VLSI Design and Systems. Module I (10 hours) Process steps in IC fabrication: Silicon wafer preparation- Czochralski process- Diffusion of impurities- physical mechanism- Ion implantation- Annealing process- Oxidation processLithography- Chemical Vapour Deposition (CVD)- epitaxial growth- reactors- metallizationpatterning- wire bonding and packaging. Module II (12 hours) Monolithic components: Isolation of components- junction isolation and dielectric isolation. Monolithic diodes- schottky diodes and transistors- buried layer- FET structures- JFETMOSFET- PMOS and NMOS, control of threshold voltage (Vth)- silicon gate technologyMonolithic resistors- resistors in diffused regionsMOS resistors- monolithic capacitors- junction and MOS structures- IC crossovers and vias. Module III (13 hours) CMOS technology: CMOS structures- Latch up in CMOS. CMOS circuits: combinational logic circuits:- Inverter-NAND, NOR gates, complex logic circuits, Full adder circuit. CMOS Transmission Gates (TG)- realization of Boolean functions using TGs. Complementary Pass Transistor Logic (CPL)- CPL circuits: NAND, NOR gates, 4bit shifter. Module IV (13 hours) CMOS sequential logic circuits: SR flip-flop, JK flip-Flop, D latch circuits. BiCMOS technology- Structure- BiCMOS circuits: Inverter, NAND gate, NOR gate. CMOS Logic systems- Scaling of MOS structures- scaling factors- effects of miniaturization. Module V (12 hours) Gallium Arsenide Technology-:- Crystal structure- Doping process- Channeling effectMESFET. Comparison between Silicon and GaAS technologies. Introduction to Programmable Logic Arrays (PLA) and Field Programmable Gate Arrays (FPGA). Syllabus - B.Tech. Applied Electronics & Instrumentation Engg. Mahatma Gandhi University Text Books 1. N Weste and K Eshrangian, “Principles of CMOS VLSI Design: A systems perspective”, Pearson Education. 2. Jan M Rabaey, Anantha Chandrakasan and Borivoje Nikolic, “Digital Integrated Circuits – A Design Perspective, Prentice Hall Reference Books 1. 2. 3. 4. S M Sze, VLSI technology, Me Graw Hill. Douglas Pucknell, Basic VLSI design, PHI. S.M.Kang & Y.Leblebici,CMOS digital integrated circuits, Mcgraw Hill. K R Botkar, Integrated Circuits , Khanna Pub. Syllabus - B.Tech. Applied Electronics & Instrumentation Engg.